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1. ´ç»ç´Â Áß±¹ OptotecÀÇ Çѱ¹ ´ë¸®Á¡À¸·Î °¢Á¾ target, alloy target(at%, wt%) ¹× ¹ÝÀÀ¼º ¹°Áú(TiO2, Nb2O5, SiO2, ITO µîµî), AF tablet(Áö¹®¹æÁö ÄÚÆÃ)À» °æÀï·ÂÀÖ´Â °¡°ÝÀ¸·Î °ø±ÞÁßÀÎ ¹Ù, °ü·Ã catalog ¹× ppt ¸¦ ÷ºÎµå¸®¿À´Ï È°¿ë °ËÅä ÇÏ¿©ÁÖ½Ã¸é °¨»çÇÏ°Ú½À´Ï´Ù.  

2. ÷ºÎ ÆÄÀÏÀº ´ÙÀ½°ú °°½À´Ï´Ù.

°¡. Optotec ȸ»ç/Á¦Ç°(Cr/Ti/Si target µî) ¼Ò°³ ppt

³ª. AF Tablet ppt (Áö¹® ¹æÁö ÄÚÆÃ)

´Ù. TiO, TiO2, Ti3O5, ZrO2, SiO2, SiO, AlO3, ITO, Ta2O5, Nb2O5, HfO2, Y2O3, Mxtures, MgF2, YF3, YbF3,

  ZnS, boat, crucible, quartz, µîµîÀÇ Ä«Å»·Î±× 1ºÎ

3. ÇöÀç Çѱ¹¿¡ targetÀ» ¼ö³â°£ Áö¼ÓÀûÀ¸·Î °ø±ÞÇÏ°í ÀÖÀ¸¸ç Ç°Áú/°¡°Ý °æÀï·ÂÀ» ÀÎÁ¤¹Þ°í ÀÖ½À´Ï´Ù

°¡°Ý °æÀï·ÂÀ» ÇÑ ¹ø check Çغ¸½Ã´Â °ÍÀÌ ¾î¶³·ÃÁö¿ä. ±Í»çÀÇ ¿ø°¡ Àý°¨¿¡ ÀÏÁ¶ ÇÒ °ÍÀ¸·Î ÆǴܵ˴ϴÙ. .

Spec ¹× ¼ö·®À» Áֽøé ÃÖ»óÀÇ °¡°ÝÀ» Á¦½Ãµå¸®°Ú½À´Ï´Ù.  

¾ðÁ¦µçÁö ¿¬¶ô Áֽøé Áï½Ã follow-up ÇÏ°Ú½À´Ï´Ù.

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Àå½ÃÇõ µå¸²

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